Semiconductors are turning up just about every place you look. From the everyday to the extraordinary, semiconductor technologies and products are everywhere. And that's just one reason we're so committed to the safety and health of our workers and our world.
The U.S. semiconductor industry ranks in the top 5 percent of durable goods manufacturers for safety, with only 1.6 reportable injuries and illnesses per 100 employees, based on Bureau of Labor Statistics data for 2003. SIA member companies participate in an internal injury and illness reporting system, the Occupation Health System (OHS). OHS data for 2003 identified only 0.93 injuries and illnesses per 100 employees. This outstanding safety record is due in large part to the SIA's long and close involvement in matters related to environment, safety, and health:
- Studying potential health risks to cleanroom workers,
- Working to reduce emissions of global warming gases,
- Evaluating the impact of environmental regulations, domestically and globally, and
- Preserving the ability to use PFOS and PFAS in leading-edge processes.
Ensuring the Health of Workers
In recent years, the semiconductor industry completed an evaluation of cancer risk among cleanroom workers. A Scientific Advisory Committee (SAC) composed of experts in occupational medicine, epidemiology, industrial hygiene, and cancer biology evaluated existing data from available literature and participating companies.
The committee concluded there was no evidence of increased cancer risk to cleanroom workers, although it could not rule out the possibility that circumstances might exist that could result in increased risk. To study the matter further, SIA embarked on three initiatives:
Retrospective scoping study - A retrospective cohort mortality scoping study to determine the feasibility of conducting retrospective epidemiology. To carry this out, a research team was retained under the direction of Johns Hopkins University (JHU).
Health surveillance study - Exploring health surveillance programs in non-semiconductor companies. This information will be provided to SIA member companies who can then assess what measures may be useful in their own programs.
Primary prevention initiatives - Developing programs to better understand properties of new chemicals and chemical processes; to investigate how non-semiconductor manufacturers introduce new chemicals into the workplace; and to evaluate whether it is possible to further reduce potential chemical exposure during maintenance of semiconductor manufacturing equipment. Teams of nationally renowned consultants are conducting these programs, which are also being funded by SIA member companies.
Based on the study conducted by Johns Hopkins, it was determined that it would be feasible to conduct a meaningful, retrospective cohort epidemiology study. With the approval of the SIA Board of Directors to fund and proceed, a Request for Proposal was prepared and distributed to qualified researchers. From the proposals received, Vanderbilt University was selected to conduct the research. On August 2, 2005 the Semiconductor Industry Association (SIA) announced that it had signed a contract with Vanderbilt University to conduct a retrospective epidemiological study to determine if there is an increased cancer risk among wafer fabrication workers compared to other semiconductor industry workers and the general population.
SIA reported that the multimillion-dollar study will review records of approximately 85,000 workers who worked in wafer fabrication facilities of member companies during the past 30 years. SIA member companies are funding the study, which will be one of the largest privately sponsored epidemiological studies ever conducted. The study will be conducted by researchers at the Vanderbilt University-Ingram Cancer Center. Results of the study are expected to be reported to the SIA in the spring of 2009.
Good For Our Workers, Good For Our Industry
SIA has a long history of involvement with health and safety issues. In 1981, SIA created a forum for US chip companies to develop a consensus on priorities and share information about state-of-the-art programs. We also established the Occupational Health System (OHS) in 1983 to track health and safety trends and document injuries and illnesses in the industry.
In 1989, in response to conflicting reports about potential cleanroom hazards to reproductive health, SIA funded and implemented one of the largest epidemiological studies ever performed by private industry. The study's findings and recommendations led the industry to voluntarily agree to eliminate certain solvents that had been used in photolithography formulations.
Working Together To Address Environmental Issues
The US semiconductor industry leads the way in developing alternatives to hazardous chemicals and pollutant emissions, and shares information about best practices with companies from other nations.
By eliminating the use of ozone-depleting substances and substituting environmentally benign solvents in manufacturing, the industry has reduced reportable emissions by nearly 75 percent in the United States since 1987
Government Agencies
In 1995, SIA members voluntarily committed to significantly reduce atmospheric emissions of perfluorocarbons (PFCs), identified as global warming gases, by signing a Memorandum of Understanding with the Environmental Protection Agency (EPA). This voluntary agreement has served as a model for voluntary agreements between industries and governments worldwide.
In 1999, the global semiconductor industry agreed to reduce absolute PFC emissions to 10 percent below their respective baselines by 2010. In 2000, SIA members and the EPA signed a new Memorandum of Understanding for reducing PFC emissions based on the global agreement and inventory methods determined by the Intergovernmental Panel on Climate Change (IPCC). This new agreement is expected to carry the industry through to the next decade.
In 2003, the SIA assisted the EPA in developing a generic photolithography scenario. Used internally by the EPA and other worldwide environmental regulatory bodies through the Organization for Economic Cooperation and Development (OECD), this document will serve as a guide for evaluating new chemicals introduced into photolithographic formulations.
World Semiconductor Council
SIA also seeks to reduce global warming gases worldwide through the Environment, Safety, and Health Task Force of the World Semiconductor Council (WSC), comprised of representatives from the United States, Europe, Japan, Korea, and Taiwan. Agreement to work toward reducing emissions of global warming gases is a prerequisite for membership on the task force. In recognition of this effort, in 1998 the EPA granted WSC one of its first Climate Protection Awards.
That same task force also created a chemical management program focused on understanding risks associated with new processing chemicals and ways to promote pollution prevention. An energy savings program is also underway. The WSC has also adopted a series of guiding principles for environment, health, and safety. In support of these principles, the task force is developing quantitative targets to monitor and judge environmental performance on a global basis.
Equitable Regulations and Standards
SIA's environment subcommittee represents the semiconductor industry in negotiations with regulatory bodies. By supplying agencies such as the EPA with relevant data and industry perspective, these committees have negotiated equitable and beneficial changes.
Maximum Achievable Control Technology
SIA subcommittees have assisted the EPA in defining the Maximum Achievable Control Technology standard (MACT) for the industry, which is a technology-based air emission standard authorized by the Clean Air Act. While the effort to secure a semiconductor industry exemption from MACT requirements was unsuccessful, the standard is not expected to pose an undue burden on association members.
Perfluorooctyl and Perfluoroalkyl Sulfonates
In a joint effort, SIA and photoresist suppliers succeeded in retaining the use of perfluorooctyl sulfonates (PFOS) and perfluoroalkyl sulfonates (PFAS) in leading-edge photoresists and anti-reflective coatings. These materials are essential to the future of semiconductor manufacturing in this country, at least through 157nm lithography.
Based on perceived toxicity and environmental concerns, the EPA had intended to phase out PFOS and PFAS through the Significant New Use Rule (SNUR) process under the Toxic Substances Control Act. However, the coalition argued that these chemicals are used in small quantities and are soundly managed, posing no risk to worker health or the environment.
As a result of the cooperative effort among SIA, SEMI, and the EPA, a PFAS SNUR was finally published in the Federal Register in 2002. It provided an exemption for uses in photolithography. A mass balance model developed for use in evaluating the potential environmental impact has been adopted by the EPA for use with other chemicals. The EPA is championing the use of this approach in international forums with regulatory agencies worldwide.
NanoESH
The semiconductor industry is rapidly entering into the era of nanotechnology. From the perspective of circuit dimensions and materials, there is a clear shift towards nanotechnology. While most semiconductor nanotechnology relates to the line and feature sizes, there is a clear indication that the use of nanomaterials is close at hand. SIA member companies and their suppliers are working together to make sure that new nanotechnologies and new nanomaterials are introduced in a way that does not adversely affect our workforce or our environment.
Fire and Building Codes
The SIA Fire and Building Safety (FABS) Committee works closely with authorities to ensure that industry needs are represented without sacrificing the integrity of fire and building codes. This is critical since semiconductor production facilities require precision construction at considerable expense.
To better oversee important changes in the building code development process, FABS reorganized as a national committee a few years ago. Two principal code developers, NFPA (the National Fire Protection Association) and ICC (the International Code Council), have taken the lead on these issues and represent broad geographic constituencies.
Committed to a Safe and Healthy Future
All of SIA's environment, safety, and health committees are working to develop and incorporate environmental, safety, and health solutions early in the design of future processes, equipment, and clean rooms. Toward this end, SIA member companies are key contributors to International SEMATECH and the NSF/SRC Engineering Research Center for Benign Semiconductor Manufacturing.
